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Confocal microscope 3D visualizing method for fine surface characterization of microstructures

著者名:
掲載資料名:
Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays : 8-9 August 1996, Denver, Colorado
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2862
発行年:
1996
開始ページ:
96
終了ページ:
101
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422507 [0819422509]
言語:
英語
請求記号:
P63600/2862
資料種別:
国際会議録

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