Fabrication and characterization of the Pd-silicided emitters for field-emission devices

Fabrication and characterization of the Pd-silicided emitters for field-emission devices

著者名:

Wang,C.-C. ( National Chiao Tung Univ. )
Ku,T.-K.
Feng,M.-S.
Hsieh,I.-J.
Cheng,H.-C.

掲載資料名:

Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2641

発行年:

1995

開始ページ:

145

終了ページ:

152

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420077 [0819420077]

言語:

英語

請求記号:

P63600/2641

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017471
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
回次:	1995
会議開催地:	Austin, TX, USA
会議開催年:	1995.10.24

類似資料:

1 国際会議録 Fabrication and characterization of gated Si field emitter arrays with gate aperture below 0.5 ｦﾌm Ku,T.-K., Hsieh,B.B., Chen,M.S., Wang,C.-C., Wang,P.W., Hsieh,I.-J., Cheng,H.-C. SPIE-The International Society for Optical Engineering	7 国際会議録 Flexible organic light-emitting devices Weaver,M.S., Hewitt,R.H., Kwong,R.C., Mao,S.Y., Michalski,L.A., Ngo,T., Rajan,K., Rothman,M.A., Silvernail,J.A., … SPIE-The International Society for Optical Engineering
2 国際会議録 Patterning effect and correlated electrical model of post-OPC MOSFET devices Y. C. Cheng, T. H. Ou, M. H. Wu, W. L. Wang, J. H. Feng, W. C. Huang, C. M. Lai, R. G. Liu, Y. C. Ku SPIE - The International Society of Optical Engineering	8 国際会議録 Fabrication of ZnO/GaN Hybrid Light-Emitting Diodes S. Y. Han, H. S. Yang, Y. W. Heo, K. H. Baik, D. P. Norton, S. J. Pearton, F. Ren, A. Osinsky, J. W. Dong, B. Hertog, A. … Electrochemical Society
3 国際会議録 Characterization of 1.55um Light Emitting β-FeSi2 Nano-dots and Metallic Silicide Nano-wires Chou, L.-J., Cheuh, Y.-L, Cheng, S.-L., Ho, H.-F., Chang, M.-T. Electrochemical Society	9 国際会議録 Fabrication and Characterization of Field Emission Devices Based on Single Vertically Aligned Carbon Nanofibers Guillorn, M.A., Merkulov, V.I., Melechko, A.V, Ellis, E.D., Baylor, L.R., Hensley, D.K., Kasica, R.J., Subich, T.R., … Electrochemical Society
4 国際会議録 Field emission display using carbon nanotubes as emitters Chuang,F.-Y., Lee,C.-C., Lin,J.-D., Liao,J.-H., Cheng,H.-C., Han,C.-X., Kwo,J.-L, Wang,W.-C. SPIE - The International Society for Optical Engineering	10 国際会議録 Fabrication Technologies of Field Emitter Arrays Choi, J. H., Ryu, Y. S., Kang, J. H., Jang, J. E., Kim, J. M., Hong, J. P., Lim, D. Y., Michine, V. MRS - Materials Research Society
5 国際会議録 Field emission characteristics of carbon nanotube emitters using screen-printing technique Lee,C.-C., Chuang,F.-Y., Lin,J.-D., Liao,J.-H., Cheng,H.-C., Sheu,J.-R., Chang,Y.-Y., Tsou,C.-C., Wang,W.-C. SPIE - The International Society for Optical Engineering	11 国際会議録 Silicide Contacts for Sub-0.25 ｦﾌm Devices Chen, L. J., Cheng, S. L., Chang, S. M., Peng, Y. C., Huang, H. Y., Cheng, L. W. MRS - Materials Research Society
6 国際会議録 EPITAXIAL GROWTH OF REFRACTORY SILICIDES ON SILICON Chen, L. J., Cheng, H. C., Lin, W. T., Chou, L. J., Fung, M. S. Materials Research Society	12 国際会議録 Temperature-dependent near-field emission profiles of oxide confined vertical-cavity surface-emitting lasers Lu, T.C., Shieu, W.J., Chang, Y.H., Laih, L.H., Wang, S.C. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12