Ion Beam and Ion-Assisted Deposition of Diamondlike Carbon Films

Ion Beam and Ion-Assisted Deposition of Diamondlike Carbon Films

著者名:

掲載資料名:

Properties and characterization of amorphous carbon films

シリーズ名:

Materials science forum

シリーズ巻号:

52-53

発行年:

1990

開始ページ:

1

終了ページ:

40

出版情報:

Zurich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878496044 [0878496041]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017428
シリーズID:	PA00000012

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