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MEMS CAD and foundries: where are we going? (Invited Paper)

著者名:
Karam,J.M. ( Techniques of Informatics and Microelectronics for Computer Architecture (France) )  
掲載資料名:
Micromachined Devices and Components III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3224
発行年:
1997
開始ページ:
232
終了ページ:
237
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426567 [0819426563]
言語:
英語
請求記号:
P63600/3224
資料種別:
国際会議録

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