BuIk-micromachined pressure sensor based on epi-poly techniques

BuIk-micromachined pressure sensor based on epi-poly techniques

著者名:

Gennissen,P.T.J. ( Deift Univ.of Technology (Netherlands) )
Ashruf,C.M.A.. ( Deift Univ.of Technology (Netherlands) )
Kaak,M. ( Hogeschool van Utrecht (Netherlands) )
French,P.J. ( Delft Univ.of Technology (Netherlands) )
Sarro,P.M. ( Delft Univ.of Technology (Netherlands) )

掲載資料名:

Micromachined Devices and Components III

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3224

発行年:

1997

開始ページ:

212

終了ページ:

219

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426567 [0819426563]

言語:

英語

請求記号:

P63600/3224

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017397
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachined Devices and Components
回次:	1997 : 3rd
会議開催地:	Austin, TX, USA
会議開催年:	1997.09.29

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2 国際会議録 Bipolar compatible epitaxial poly for surface-micromachined smart sensors Gennissen,P.T., French,P.J., Bartek,M., Sarro,P.M., Boogaard,A.van der, Visser,C. SPIE-The International Society for Optical Engineering	8 国際会議録 Pressure and flow sensor for use in catheters Goosen,J.F.L., French,P.J., Sarro,P.M. SPIE - The International Society for Optical Engineering
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