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Automatic test equipment for the micromirror array

著者名:
Kim,H. ( Chung-Ang Univ.(Korea) )
Cho,K. ( Chung-Ang Univ.(Korea) )
Kim,Y.-K. ( Seoul National Univ.(Korea) )
Shin,J.-W. ( Seoul National Univ.(Korea) )
Shin,H.-J. ( Samsung Electronics Co.,Ltd. (Korea) )
Moon,J.-H. ( Samsung Electronics Co.,Ltd. (Korea) )
さらに 1 件
掲載資料名:
Miniaturized Systems with Micro-Optics and Micromechanics III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3276
発行年:
1998
開始ページ:
103
終了ページ:
110
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427151 [0819427152]
言語:
英語
請求記号:
P63600/3276
資料種別:
国際会議録

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