Integrated mixedtechnology design environment to support micro-electro-mechanical systems development

Integrated mixedtechnology design environment to support micro-electro-mechanical systems development

著者名:

Karam,J.M. ( MEMSCAP SA (France) )
Courtois,B. ( TIMA Lab. (France) )
Cao,A.D. ( Mentor Graphics Corp. )
Hofmann,K. ( Darmstadt Univ.Qf Technology (Germany) )

掲載資料名:

Micromachined Devices and Components IV

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3514

発行年:

1998

開始ページ:

278

終了ページ:

286

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429735 [0819429732]

言語:

英語

請求記号:

P63600/3514

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017376
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachined Devices and Components
回次:	1998 : 4th
会議開催地:	Santa Clara, CA, USA
会議開催年:	1998.09.21-1998.09.22

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