Self-assembling growth of silicon nanostructures with micro shadow masks

Self-assembling growth of silicon nanostructures with micro shadow masks

著者名:

掲載資料名:

Low dimensional structures prepared by epitaxial growth or regrowth on patterned substrates

シリーズ名:

NATO ASI series. Series E, Applied sciences

シリーズ巻号:

298

発行年:

1995

開始ページ:

161

終了ページ:

172

総ページ数:

12

出版情報:

Dordrecht: Kluwer Academic Publishers

ISSN:

0168132X

ISBN:

9780792336792 [0792336798]

言語:

英語

請求記号:

N11482/298

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017323
シリーズID:	PA00000018
会議名:	NATO Advanced Research Workshop on Low Dimensional Structures Prepared by Epitaxial Growth or Regrowth on Patterned Substrates
回次:	1995
会議開催地:	Ringberg in Rottach Egern, Germany
会議開催年:	1995.02.20-1995.02.24

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