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Silicon epitaxy and oxidation

著者名:
Meindl D. J.
Dutton W. R.
Saraswat C. K.
Plummer D. J.
Kamins I. T.
Deal E. B.
さらに 1 件
掲載資料名:
Process and device modeling for integrated circuit design : [proceedings of the NATO Advanced Study Institute on Process and device modeling for integrated circuit design, Louvain-la-Neuve, Belgium, July 19-29, 1977]
シリーズ名:
NATO ASI series. Series E, Applied sciences
シリーズ巻号:
21
発行年:
1977
開始ページ:
57
終了ページ:
113
総ページ数:
57
出版情報:
Leyden: Noordhoff International Publishing
ISSN:
0168132X
ISBN:
9789028606678 [902860667X]
言語:
英語
請求記号:
N11482/21
資料種別:
国際会議録

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