Coated optics for DUV-excimer laser applications

Coated optics for DUV-excimer laser applications

著者名:

Ullmann,J. ( Carl Zeiss )

掲載資料名:

Laser-induced damage in optical materials, 1999 : 31th Annual Boulder Damage Symposium, proceedings, 4-7, October, 1999, Boulder, Colorado

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3902

発行年:

2000

開始ページ:

514

終了ページ:

527

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819435088 [0819435082]

言語:

英語

請求記号:

P63600/3902

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017167
シリーズID:	PA00000029
会議名:	Laser Damege : Laser-induced damage in optical materials - Annual Boulder Damage Symposium
回次:	1998 : 31th
会議開催地:	Boulder, CO, USA
会議開催年:	1999.10.04-1999.10.07

類似資料:

1 国際会議録 Coated optics for DUV excimer laser applications Ullmann,J., Mertin,M., Lauth,H., Bernitzki,H., Mann,K.R., Ristau,D., Arens,W., Thielsch,R., Kaiser,N. SPIE - The International Society for Optical Engineering	7 国際会議録 Changes in optical interference coatings exposed to 193-nm excimer laser radiation Heber,J., Thielsch,R., Blaschke,H., Kaiser,N., Leinhos,U., Gortler,A. SPIE - The International Society for Optical Engineering
2 国際会議録 Properties of fluoride DUV excimer laser optics:influence of the number of dielectric layers Arens,W., Ristau,D., Ullmann,J., Zaczek,C., Thielsch,R., Kaiser,N., Duparre,A., Apel,O., Mann,K.R., Lauth,H., … SPIE - The International Society for Optical Engineering	8 国際会議録 Structural and mechanical properties of evaporated pure and mixed MgF2-BaF2 thin films Thielsch,R., Pommies,M., Heber,J., Kaiser,N., Ullmann,J. SPIE - The International Society for Optical Engineering
3 国際会議録 Current status of radiation resistance of dielectric mirrors in the DUV Bernitzki,H., Lauth,H., Thielsch,R., Blaschke,H., Kaiser,N., Mann,K.R. SPIE - The International Society for Optical Engineering	9 国際会議録 Properties of SiO2 and AI2O3 films for use in UV optical coatings Thielsch,R., Duparre,A., Schulz,U., Kaiser,N., Mertin,M., Bauer,H.H. SPIE-The International Society for Optical Engineering
4 国際会議録 Long-time radiation-resistant optical coatings for UV excimer laser applications Laux,S., Bernitzki,H., Klaus,M., Lauth,H., Kaiser,N. SPIE-The International Society for Optical Engineering	10 国際会議録 Stability of optical interference coatings exposed to low-fluence 193-nm ArF radiation Heber,J., Thielsch,R., Blaschke,H., Kaiser,N., Mann,K.R., Eva,E., Leinhos,U., Gortler,A. SPIE-The International Society for Optical Engineering
5 国際会議録 Excimer laser interactions with dielectric thin films for advanced projection optics Kaiser,N., Thielsch,R., Mertin,M., Bauer,H.H., Welsch,E. SPIE-The International Society for Optical Engineering	11 国際会議録 Lanthanide tri-fluorides: a survey of the optical, mechanical and structural properties of thin films with emphasis of their use in the DUV-VUV-spectral range … Uhlig, H., Thielsch, R., Heber, J., Kaiser, N. SPIE - The International Society of Optical Engineering
6 国際会議録 EUV and soft x-ray multilayer optics Kaiser, N., Yulin, S., Feigl, T., Bernitzki, H., Lauth, H. SPIE - The International Society of Optical Engineering	12 国際会議録 Laser conditioning of LaF₃/MgF₂ dielectric coatings for excimer lasers N. Kaiser, B. Anton, H. Jänchen, K.R. Mann, E. Eva Society of Photo-optical Instrumentation Engineers

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