Limiting factors in the production of deep microstructures
- 著者名:
- Tolfree,D.W. ( Faraday Foresight Northwest Ltd. )
- O'Neill,W.
- Tunna,L.
- Sutcliffe,C.
- 掲載資料名:
- Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3892
- 発行年:
- 1999
- 開始ページ:
- 242
- 終了ページ:
- 252
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434937 [0819434930]
- 言語:
- 英語
- 請求記号:
- P63600/3892
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Cold Gas Dynamic Manufacturing: A New Approach to Near-Net Shape Metal Component Fabrication
Materials Research Society |
ESA Publications Division |
SPIE-The International Society for Optical Engineering |
D. Reidel |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Kluwer Academic Publishers |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
Elsevier |
Society of Manufacturing Engineers |