Plasma ashing using microwaves via slot antenna for 300-mm wafers
- 著者名:
Furuya,M. ( Toshiba Corp. ) Kano,M. Terai,F. Aoki,K. Yamauchi,T. Yamada,K. Tamai,K. Azumano,H. - 掲載資料名:
- Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3882
- 発行年:
- 1999
- 開始ページ:
- 239
- 終了ページ:
- 246
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434791 [0819434795]
- 言語:
- 英語
- 請求記号:
- P63600/3882
- 資料種別:
- 国際会議録
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