Micro-optical devices in a Japanese national project
- 著者名:
- Nakatsu,K. ( Micromachine Ctr. )
- Mitsumoto,N.
- Nemoto,K.
- Ishikawa,Y.
- Hirano,T.
- 掲載資料名:
- Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4075
- 発行年:
- 2000
- 開始ページ:
- 32
- 終了ページ:
- 40
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437129 [0819437123]
- 言語:
- 英語
- 請求記号:
- P63600/4075
- 資料種別:
- 国際会議録
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