Control of Grain Size of Pb(Zr,Ti)O3 Thin Films by MOCVD and the Effect of Size on the Electrical Properties
- 著者名:
- 掲載資料名:
- Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 541
- 発行年:
- 1999
- 開始ページ:
- 327
- 出版情報:
- Warrendale, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994478 [1558994475]
- 言語:
- 英語
- 請求記号:
- M23500/541
- 資料種別:
- 国際会議録
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5
国際会議録
Effects of Sputtered Ir and IrO2 Electrodes on the Properties of PZT Thin Films Deposited by MOCVD
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