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Characterization of RuO2 Films Prepared by RF Reactive Magnetron Sputtering

著者名:
掲載資料名:
Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
541
発行年:
1999
開始ページ:
141
出版情報:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994478 [1558994475]
言語:
英語
請求記号:
M23500/541
資料種別:
国際会議録

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