Rapid Thermal Processing of III-Nitrides | 東京工業大学附属図書館文献データベース

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Rapid Thermal Processing of III-Nitrides

著者名:

MacKenzie, J. D.

Abernathy, C. R.

Crockett, R. V.

さらに 5 件

掲載資料名:

Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

470

発行年:

1997

開始ページ:

401

出版情報:

Pittsburgh, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993747 [1558993746]

言語:

英語

請求記号:

M23500/470

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017058
シリーズID:	PA00000011
会議名:	Symposium on rapid thermal and integrated processing
回次:	6th
会議開催地:	San Francisco, CA, USA
会議開催年:	1997.04.01-1997.04.04

類似資料:

1 国際会議録 Role of C. O and H in III-Nitrides Abernathy, C. R., Pearton, S. J., Mackenzie, J. D., Lee, J. W., Vartuli, C. B., Wilson, R. G., Shul, R. J., Zolper, J. … MRS - Materials Research Society	7 国際会議録 Chemical Etching of AlN and InAlN in KOH Solutions Vartuli, C. B., Lee, J. W., MacKenzie, J. D., Pearton, S. J., Abernathy, C. R., Zolper, J. C., Shul, R. J., Ren, F. MRS - Materials Research Society
2 国際会議録 Plasma Chemistries for Dry Etching GaN, AlN, InGaN and InAlN Pearton, S. J., Vartuli, C. B., Lee, J. W., Donovan, S. M., MacKenzie, J. D., Abernathy, C. R., Shul, R. J., McLane, G. … MRS - Materials Research Society	8 国際会議録 Properties of H, O and C in GaN Pearton, S. J., Abernathy, C. R., Lee, J. W., Vartuli, C. B., MacKenzie, J. D., Ren, F., Wilson, R. G., Zavada, J. M., … MRS - Materials Research Society
3 国際会議録 Dry Etch Damage in InN, InGaN and InAlN Pearton, S. J., Lee, J. W., MacKenzie, J. D., Vartuli, C. B., Donovan, S. M., Abernathy, C. R., Shul, R. J., Ren, F., … MRS - Materials Research Society	9 国際会議録 ICP Dry Etching of III-V Nitrides Vartuli, C. B., Lee, J. W., MacKenzie, J. D., Donovan, S. M., Abernathy, C. R., Pearton, S. J., Shul, R. J., … MRS - Materials Research Society
4 国際会議録 Plasma Damage Effects in InAlN Field-Effect Transistors Ren, F., Lothian, J. R., Chen, Y. K., MacKenzie, J. D., Donovan, S. M., Abernathy, C. R., Vartuli, C. B., Lee, J. W., … MRS - Materials Research Society	10 国際会議録 High Temperature Surface Degradation of III-V Nitrides Vartuli, C. B., Pearton, S. J., Abernathy, C. R., MacKenzie, J. D., Zolper, J. C., Lambers, E. S. MRS - Materials Research Society
5 国際会議録 Hydrogen Incorporation into III-V Nitrides During Processing Pearton, S.J., Shul, R.J., Wilson, R.G., Ren, F., Zavada, J.M., Abernathy, C.R., Vartuli, C.B., Lee, J.W., Mileham, … Electrochemical Society	11 国際会議録 Comparison of ICI and Ibr for Dry Etching of III-Nitrides Vartuli, C. B., Lee, J. W., MacKenzie, J. D., Pearton, S. J., Abernathy, C. R., Shul, R. J. MRS - Materials Research Society
6 国際会議録 Wet Chemical Etching Survey of III-Nitrides Cho, Hyun, Hays, D. C., Vartuli, C. B., Pearton, S. J., Abernathy, C. R., MacKenzie, J. D., Ren, F., Zolper, J. C. MRS - Materials Research Society	12 国際会議録 InN-Based Ohmic Contacts to AlInN Donovan, S. M., Ren, F., MacKenzie, J. D., Abernathy, C. R., Pearton, S. J., Jones, K. MRS - Materials Research Society

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