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Rapid Thermal Process Requirements for the Annealling of Ultrashallow Junctions

著者名:
Downey, Daniel F.
Daryanani, Sonu L.
Meloni, Marylou
Brown, Kristen M.
Felch, Susan B.
Lee, Brian S.
Marcus, Steven D.
Gelpey, Jeff
さらに 3 件
掲載資料名:
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
470
発行年:
1997
開始ページ:
299
出版情報:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993747 [1558993746]
言語:
英語
請求記号:
M23500/470
資料種別:
国際会議録

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