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Kinetics of Pt Silicide Formation Studied by Spectral Ellipsometry

著者名:
Schwarz, R.
Dittrich, A.
Zhou, S. M.
Hundhausen, M.
Ley, L.
Chen, L. Y.
Woerle, D.
Manke, C.
Schulz, M.
さらに 4 件
掲載資料名:
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
470
発行年:
1997
開始ページ:
259
出版情報:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993747 [1558993746]
言語:
英語
請求記号:
M23500/470
資料種別:
国際会議録

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