Blank Cover Image

Rapid Thermal Annealing and Oxidation of Silicon Wafers With Back-Side Films

著者名:
Fiory, A. T.  
掲載資料名:
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
470
発行年:
1997
開始ページ:
49
出版情報:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993747 [1558993746]
言語:
英語
請求記号:
M23500/470
資料種別:
国際会議録

類似資料:

Fiory, A. T.

MRS - Materials Research Society

Fitch, J. T., Lucovsky, G.

Materials Research Society

Fiory, A. T., Nanda, A. K.

MRS - Materials Research Society

Fiory, A. T.

MRS - Materials Research Society

Agarwal, A., Gossmann, H.-J.L., Fiory, A.T., Venezia, V.C., Jacobson, D.C.

Electrochemical Society

Oh, Minseok, Nguyenphu, Binh, Fiory, Anthony T.

MRS - Materials Research Society

Nguyenphu, Binh, Oh, Minseok, Fiory, Anthony T.

MRS - Materials Research Society

Agarwal, A., Gossmann, H-J., Fiory, A. T.

MRS - Materials Research Society

Mehta, V. R., Fiory, A. T., Ravindra, N. M., Ho, M. Y., Wilk, G. D., Sorsch, T. W.

Materials Research Society

Fukada, T., Yoo, W.S., Hiraga, Y., Kang, K., Kitayama, H.

Electrochemical Society

Nagabushnam, V., Singh, R. K.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12