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Parameter Optimization of a Microfabricated Surface-Acoustic-Wave Sensor for Inert Gas Detection

著者名:
掲載資料名:
Materials for smart systems II : sympsoium held December 2-5, 1996, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
459
発行年:
1997
開始ページ:
75
出版情報:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993631 [1558993630]
言語:
英語
請求記号:
M23500/459
資料種別:
国際会議録

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