Anhydrous HF Processing as an Alternative to HF/Water Processes

Anhydrous HF Processing as an Alternative to HF/Water Processes

著者名:

掲載資料名:

Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

447

発行年:

1997

開始ページ:

9

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993518 [1558993517]

言語:

英語

請求記号:

M23500/447

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017056
シリーズID:	PA00000011
会議名:	Symposium on environmental, safety, and health issues in ic production
回次:	1996
会議開催地:	Boston, MA, USA
会議開催年:	1996.12.04-1996.12.05

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