A Microstructural and Electrical Investigation of Pd/Ge/Ti/Au Ohmic Contact to n-Type GaAs
- 著者名:
Kwak, J. S. Baik, H. K. Kim, H. Lee, J.-L. Shin, D. W. Park, C. G. - 掲載資料名:
- Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 427
- 発行年:
- 1996
- 開始ページ:
- 571
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993303 [1558993304]
- 言語:
- 英語
- 請求記号:
- M23500/427
- 資料種別:
- 国際会議録
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