In Situ Multi-Wavelength Ellipsometric Control of Thickness and Composition for Bragg Reflector Structures
- 著者名:
Herzinger, Craig Johs, Blaine Chow, Peter Reich, Dave Carpenter, Greg Croswell, Dan Hove, Jim Van - 掲載資料名:
- Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 406
- 発行年:
- 1996
- 開始ページ:
- 347
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993099 [1558993096]
- 言語:
- 英語
- 請求記号:
- M23500/406
- 資料種別:
- 国際会議録
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