AFM/TEM Investigation of Low Temperature Polycrystalline Silicon Grown by ECR-CVD

AFM/TEM Investigation of Low Temperature Polycrystalline Silicon Grown by ECR-CVD

著者名:

Hsiao, H. L.

掲載資料名:

Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

406

発行年:

1996

開始ページ:

195

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993099 [1558993096]

言語:

英語

請求記号:

M23500/406

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017052
シリーズID:	PA00000011
会議名:	Symposium on diagnostic techniques for semiconductor materials processing
回次:	2nd
会議開催地:	Boston, MA, USA
会議開催年:	1995.11.27-1995.11.30

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1 国際会議録 Facetting Growth of Low-Temperature Polycrystalline Silicon by ECR-CVD with Hydrogen Dilution Method Hsiao, H-L., Yang, A-B., Hwang, H-L. MRS - Materials Research Society	7 国際会議録 Methylamine growth of SiCN films using ECR-CVD Wen, C-Y., Wu, J-J., Lo, H. J., Chen, L. C., Chen, K. H., Lin, S. T., Yu, Y-C., Wang, C-W., Lin, E-K. MRS-Materials Research Society
2 国際会議録 CROSS-SECTIONAL TEM INVESTIGATION OF LOW-TEMPERATURE EPITAXIAL SILICON FILMS GROWN BY ULTRA-LOW PRESSURE CVD Yew, T.R., Comfort, J.H., Garverick, L.M., Burger, W.R., Reif, R. Materials Research Society	8 国際会議録 GaN Growth by Nitrogen ECR-CVD Method Chen, K. H., Chao, C. H., Chuang, T. J., Yang, Y. J., Chen, L. C., Chen, C. K., Huang, Y. F., Yang, C. H., Lin, H. Y., … MRS - Materials Research Society
3 国際会議録 Grain Formation in Polycrystalline Silicon Films Deposition on SiO2 at Very Low Temperatures Wang, K.-C., Wang, R.-Y., Yew, T.-R., Loferski, J. J., Hwang, H.-L. MRS - Materials Research Society	9 国際会議録 Silicon Carbon Nitride Films Deposited by ECR CVD Chen, K-H., Wu, J.-J., Wen, C.-Y., Chen, L-C., Fan, C.-W, Kuo, P.-F., Chen, Y.-F., Huang, Y.-S. Electrochemical Society
4 国際会議録 Thin film transistors made from hydrogenated microcrystalline silicon Wang, K. C., Chen, B. Y., Hsu, K. C., Yew, T. R., Hwang, H. L. MRS - Materials Research Society	10 国際会議録 Low-Temperature Growth of Crystalline Silicon Thin Films by ECR Plasma CVD Wang, Licai., Reehal, H. S. MRS - Materials Research Society
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6 国際会議録 VERY LOW TEMPERATURE DEPOSITION OF POLYCRYSTALLINE SILICON FILMS WITH MICRO-METER-ORDER GRAINS ON SiO2 Wang, Kun-Chih, Yew, Tri-Rung, Hwang, Huey-Liang MRS - Materials Research Society	12 国際会議録 Low Temperature Fabrication of Polycrystalline Silicon Thin Films by ECR PECVD Jeon, Y.C., Lee, S.W. Electrochemical Society

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