Process Diagnostics for Remote Plasma-Enhanced Chemical Vapor Desposition (PECVD) of Silicon Nitrides
- 著者名:
- 掲載資料名:
- Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 406
- 発行年:
- 1996
- 開始ページ:
- 63
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993099 [1558993096]
- 言語:
- 英語
- 請求記号:
- M23500/406
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |
American Institute of Chemical Engineers |
MRS - Materials Research Society |
MRS - Materials Research Society |