Phosphorus and Aluminum Gettering of Gold in Silicon: Simulation and Optimization Considerations

Phosphorus and Aluminum Gettering of Gold in Silicon: Simulation and Optimization Considerations

著者名:

掲載資料名:

Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

378

発行年:

1995

開始ページ:

297

出版情報:

Pittsburgh, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992818 [1558992812]

言語:

英語

請求記号:

M23500/378

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017050
シリーズID:	PA00000011
会議名:	Symposium on defect and impurity engineered semiconductors and devices
回次:	1995
会議開催地:	San Francisco, CA, USA
会議開催年:	1995.04.17-1995.04.21

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1 国際会議録 Point Defects, Diffusion, and Gettering in Silicon Gosele, U., Conrad, D., Werner, P., Tong, Q-Y., Gafiteanu, R., Tan, T. Y. MRS - Materials Research Society	7 国際会議録 DIFFUSION-SEGREGATION EQUATION FOR SIMULATION IN HETEROSTRUCTURES Gafiteanu, R., You, H.-M., Goesele, U., Tan, T. Y. MRS - Materials Research Society
2 国際会議録 Gold Diffusion in Silicon During Gettering by an Aluminum Layer Joshi, Subhash M., Gosele, Ulrich M., Tan, Teh Y. MRS - Materials Research Society	8 国際会議録 DIFFUSION-SEGREGATION EQUATION AND SIMULATION OF THE DIFFUSION-SEGREGATION PHENOMENA Tan, T.Y., Gafiteanu, R., Goesele, U.M. Electrochemical Society
3 国際会議録 INVITED: SCIENCE AND MODELING OF IMPURITY GETTERING IN SILICON Tan, T.Y., Gafiteanu, R., Joshi, S.M., Goesele, U.M. Electrochemical Society	9 国際会議録 Simulation of Under- and Supersaturation of Gallium Vacancies in Gallium Arsenide During Silicon In- and Outdiffusion Chen, C. -H., Gosele, U., Tan, T. Y. MRS - Materials Research Society
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5 国際会議録 Minority Carrier Diffusion Length Improvement in Czochralski Silicon by Aluminum Gettering Joshi, Subhash M., Gosele, Ulrich M., Tan, Teh Y. MRS - Materials Research Society	11 国際会議録 Recent Progresses in Understanding Gettering in Silicon Tan, T.Y. Materials Research Society
6 国際会議録 Phosphorus Diffusion Gettering of Gold in Silicon Sveinbjornsson,E.O., Engstrom,O., Sodervall,U. Trans Tech Publications	12 国際会議録 LOW TEMPERTURE WAFER DIRECT BONDING Q.-Y. Tong, G. Cha, R. Gafiteanu, U. Gosele Electrochemical Society

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