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SCALING ANALYSIS OF α- AND poly-Si SURFACE ROUGHNESS BY ATOMIC FORCE MICROSCOPY

著者名:
掲載資料名:
Fractal aspects of materials : symposium held November 28-December 1, 1994, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
367
発行年:
1995
開始ページ:
329
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992689 [1558992685]
言語:
英語
請求記号:
M23500/367
資料種別:
国際会議録

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