STRESS EVOLUTION DURING THE FORMATION AND TRANSFORMATION OF TITANIUM SILICIDE

STRESS EVOLUTION DURING THE FORMATION AND TRANSFORMATION OF TITANIUM SILICIDE

著者名:

掲載資料名:

Thin films, stresses and mechanical properties V : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

356

発行年:

1995

開始ページ:

167

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992573 [155899257X]

言語:

英語

請求記号:

M23500/356

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017048
シリーズID:	PA00000011
会議名:	Symposium on thin films
回次:	5th
会議開催地:	Boston, MA, USA
会議開催年:	1994.11.28-1994.12.02

類似資料:

1 国際会議録 Surface Roughening During Titanium Silicide Formation: A Comparison Between Si(100) and Poly-Si Substrates Lavoie, C., Martel, R., Cabral, C., Jr., Clevenger, L. A., Harper, J. M. E. MRS - Materials Research Society	7 国際会議録 In-Situ Resistance Measurements During Rapid Thermal Annealing for Process Characterization Colgan, E. G., Cabral, C., Jr., Clevenger, L. A., Harper, J. M. E. MRS - Materials Research Society
2 国際会議録 Light Scattering Measurement of Surface Topography During Formation of Titanium Silicide Lavoie, C., Cabral, C., Jr., Clevenger, L. A., Harper, J. M. E., Jordan-Sweet, J., Saenger, K. L., Doany, F. MRS - Materials Research Society	8 国際会議録 DETECTION OF TITANIUM SILICIDE FORMATION AND PHASE TRANSFORMATION BY PICOSECOND UNTRASONICS Lin, H.-N,, Stoner, R. J., Maris, H. J., Harper, J. M. E., Cabral Jr., C., Halbout, J.-M, Rubloff, G. W. Materials Research Society
3 国際会議録 SILICIDE FORMATION IN Ti-Si AND Co-Si REACTIONS Clevenger, L. A., Hong, Q. Z., Mann, R., Harper, J. M. E., Barmak, K., Cabral, C., Jr., Nobili, C., Ottaviani, G. MRS - Materials Research Society	9 国際会議録 Dependence of Crystallographic Texture of C54 TiSi2 on Thickness and Linewidth in Submicron CMOS Structures Svilan, V., Rodbell, K. P., Clevenger, L. A., Cabral, C., Jr., Roy, R. A., Lavoie, C., Jordan-Sweet, J., Harper, J. M. … MRS - Materials Research Society
4 国際会議録 In Situ TEM Analysis of TiSi2 C49-C54 Transformations During Annealing Gignac, L. M., Svilan, V., Clevenger, L. A., Cabral, C., Jr., Lavoie, C. MRS - Materials Research Society	10 国際会議録 In Situ X-ray Diffraction Analysis of TiSi2 Phase Formation From a Titanium-Molybdenum Bilayer Cabral, C., Jr., Clevenger, L. A., Harper, J. M. E., Roy, R. A., Saenger, K. L., Miles, G. L., Mann, R. W. MRS - Materials Research Society
5 国際会議録 EFFECT OF DEPOSITION CONDITIONS ON INTRINSIC STRESS, PHASE TRANSFORMATION AND STRESS RELAXATION IN TANTALUM THIN FILMS Mustcheller, A., Clevenger, L. A., Harper, J. M. E., Cabral Jr., C., Barmak, K. Materials Research Society	11 国際会議録 Effect of Boron Doping on the C49 to C54 Phase Transformation in Ti/Si(100) Bilayers Quintero, A., Libera, M., Cabral, C., Jr., Clevenger, L. A., Harper, J. M. E. MRS - Materials Research Society
6 国際会議録 In-Situ Measurements During Rapid Thermal Annealing for Process Characterization Colgan, E. G., Cabral, C., Jr., Clevenger, L. A., Harper, J. M. E. MRS - Materials Research Society	12 国際会議録 KINETICS OF INTERMETALLIC FORMATION IN FREE STANDING Cu/Mg MULTILAYER THIN FILMS Arcot, B., Clevenger, L. A., Murarkar, S. P., Harper, J. M. E., Cabral Jr., C. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12