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Reflectivity of micromachined{111}-oriented silicon mirrors for optical input/output couplers

著者名:
掲載資料名:
Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2881
発行年:
1996
開始ページ:
45
終了ページ:
54
出版情報:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422798 [0819422797]
言語:
英語
請求記号:
P63600/2881
資料種別:
国際会議録

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