Analysis of the thickness measurement of multilayer optical thin films with grazing incident x ray

Analysis of the thickness measurement of multilayer optical thin films with grazing incident x ray

著者名:

Li,X. ( Changchun Institute of Optics and Fine Mechanics (China) )
Song,X. ( Changchun Institute of Optics and Fine Mechanics (China) )
Qu,Y. ( Changchun Institute of Optics and Fine Mechanics (China) )
Li,M. ( Changchun Institute of Optics and Fine Mechanics (China) )
Zhang,X. ( Changchun Institute of Optics and Fine Mechanics (China) )

掲載資料名:

Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3175

発行年:

1998

開始ページ:

470

終了ページ:

473

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426734 [0819426733]

言語:

英語

請求記号:

P63600/3175

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016935
シリーズID:	PA00000029
会議名:	International Conference on Thin Film Physics and Applications
回次:	1997 : 3rd
会議開催地:	Shanghai, China
会議開催年:	1997.04.15-1997.04.17

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