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Nondestructive measurement of layer thickness in double heterostructures x ray by double crystal diffraction

著者名:
Qu,Y. ( Changchun Institute of Optics and Fine Mechanics (China) )
Li,X. ( Changchun Institute of Optics and Fine Mechanics (China) )
Song,X. ( Changchun Institute of Optics and Fine Mechanics (China) )
Zhang,X. ( Changchun Institute of Optics and Fine Mechanics (China) )
Wang,L. ( Changchun Institute of Optics and Fine Mechanics (China) )
Qie,X. ( Changchun Institute of Optics and Fine Mechanics (China) )
さらに 1 件
掲載資料名:
Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3175
発行年:
1998
開始ページ:
378
終了ページ:
380
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426734 [0819426733]
言語:
英語
請求記号:
P63600/3175
資料種別:
国際会議録

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