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Preparation and electrical properties of Zr-rich PZT thin films by rf magnetron sputtering method using multitarget

著者名:
  • Wang,W. ( Toyama Prefectural Univ.(Japan) )
  • Chen,Z. ( Toyama Prefectural Univ.(Japan) )
  • Adachi,M. ( Toyama Prefectural Univ.(Japan) )
  • Kawabata,A. ( Toyama Prefectural Univ.(Japan) )
掲載資料名:
Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3175
発行年:
1998
開始ページ:
366
終了ページ:
370
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426734 [0819426733]
言語:
英語
請求記号:
P63600/3175
資料種別:
国際会議録

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