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Transmission electron microscopy of defects in NMOS and PMOS structures

著者名:
Bourdillon,A.J. ( National Univ.of Singapore )
Koh,Y.G. ( National Univ.of Singapore )
Chiang,S.L. ( National Univ.of Singapore )
Lim,C.W. ( National Univ.of Singapore )
Kong,J.R. ( National Univ.of Singapore )
Guobing,C. ( Singapore Productivity and Standards Board )
さらに 1 件
掲載資料名:
Microlithographic Techniques in IC Fabrication
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3183
発行年:
1997
開始ページ:
236
終了ページ:
242
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426109 [0819426105]
言語:
英語
請求記号:
P63600/3183
資料種別:
国際会議録

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