Influence of oxygen precipitates on the measurement of minority carrier diffusion length in p-type silicon material using surface photovoltage technique
- 著者名:
Ma,Y. ( Lucent Technologies Bell labs. ) Lee,J.L. ( Lucent Technologies Bell labs. ) Benton,J.L. ( Lucent Technologies Bell labs. ) Boone,T. ( Lucent Technologies Bell labs. ) Eaglesham,D.J. ( Lucent Technologies Bell labs. ) Higashi,G.S. ( Lucent Technologies Bell labs. ) - 掲載資料名:
- In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3215
- 発行年:
- 1997
- 開始ページ:
- 17
- 終了ページ:
- 24
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426475 [0819426474]
- 言語:
- 英語
- 請求記号:
- P63600/3215
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Materials Research Society |
SPIE - The International Society for Optical Engineering |
National Aeronautics and Space Adminstration |
Electrochemical Society | |
MRS - Materials Research Society |
10
国際会議録
Diffusion Length Measurements of Minority Carriers in Si-SiO2 Using The Photo-Grating Technique
Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
Electrochemical Society |
Materials Research Society |