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Analysis and enhancement of bond strength of acrylic sheets to metallic substrates for use in LIGA-type processing

著者名:
掲載資料名:
Microlithography and Metrology in Micromachining III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3225
発行年:
1997
開始ページ:
85
終了ページ:
90
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426574 [0819426571]
言語:
英語
請求記号:
P63600/3225
資料種別:
国際会議録

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