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Engineering tool set for monolithic and hybrid microsystem design

著者名:
Boutamine,H. ( Techniques of Informatics and Microelectronics for Computer Architecture (France )
Karam,J.M. ( Techniques of Informatics and Microelectronics for Computer Architecture (France )
Courtois,B. ( Techniques of Informatics and Microelectronics for Computer Architecture (France )
Drake,P. ( Mentor Graphics )
Oudinot,J. ( Mentor Graphics )
El Tahawi,H. ( Mentor Graphics )
Cao,A. ( Mentor Graphics )
Rencz,M. ( Technical Univ.of Budapest (Hungary) )
Poppe,A. ( Technical Univ.of Budapest (Hungary) )
Szekely,V. ( Technical Univ.of Budapest (Hungary) )
さらに 5 件
掲載資料名:
Microlithography and Metrology in Micromachining III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3225
発行年:
1997
開始ページ:
76
終了ページ:
84
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426574 [0819426571]
言語:
英語
請求記号:
P63600/3225
資料種別:
国際会議録

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