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Estimation of Carbon in Undoped SI GaAs by SIMS and ERDA

著者名:
Kumar,R.
Ram Nath
Anuradha Dhaul
Dutt,M.B.
Kabiraj,D.
Avasthi,D.K.
さらに 1 件
掲載資料名:
Physics of - Semiconductor Devices -
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3316
発行年:
1998
巻:
Part 1
開始ページ:
329
終了ページ:
332
出版情報:
New Delhi: Narosa Publishing House
ISSN:
0277786X
ISBN:
9780819427564 [081942756X]
言語:
英語
請求記号:
P63600/3316
資料種別:
国際会議録

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