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Scanned e-beam annealing of MOS devices

著者名:
  • Speight, J.D. ( British Telecommunications Research Laboratories, Martlesham Heath, Ipswich 1P5 7RE, England )
  • Glaccum, A.E. ( British Telecommunications Research Laboratories, Martlesham Heath, Ipswich 1P5 7RE, England )
  • Machin, D. ( British Telecommunications Research Laboratories, Martlesham Heath, Ipswich 1P5 7RE, England )
  • McMahon, R.A. ( Engineering Department, University of Cambridge, Cambridge CB2 1PZ, England )
  • Ahmed, H. ( Engineering Department, University of Cambridge, Cambridge CB2 1PZ, England )
掲載資料名:
Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposia proceedings
シリーズ巻号:
1
発行年:
1981
開始ページ:
383
終了ページ:
390
出版情報:
New York: North Holland
ISSN:
02729172
ISBN:
9780444005953 [0444005951]
言語:
英語
請求記号:
M23500/1
資料種別:
国際会議録

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