Multiple-scan e-beam method applied to a range of semiconducting materials

著者名:

• Shah, N.J. ( Engineering Department, Cambridge University, Trumpington Street, Cambridge CB2 1PZ, England )
• McMahon, R.A. ( Engineering Department, Cambridge University, Trumpington Street, Cambridge CB2 1PZ, England )
• Williams, J.G.S. ( Engineering Department, Cambridge University, Trumpington Street, Cambridge CB2 1PZ, England )
• Ahmed, H. ( Engineering Department, Cambridge University, Trumpington Street, Cambridge CB2 1PZ, England )

掲載資料名:

Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposia proceedings

シリーズ巻号:

1

発行年:

1981

開始ページ:

201

終了ページ:

208

出版情報:

New York: North Holland

ISSN:

02729172

ISBN:

9780444005953 [0444005951]

言語:

英語

請求記号:

M23500/1

資料種別:

国際会議録