Deposition of Silicon Dioxide Films using the Helicon Diffusion Reactor for Integrated Optics Applications
類似資料:
SPIE-The International Society for Optical Engineering |
American Institute of Aeronautics and Astronautics |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
4
国際会議録
Mechanical properties of PECVD silicon oxide films suitable for integrated optics applications
SPIE - The International Society for Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
Materials Research Society |