Blank Cover Image

ON THE TRANSPORT OF SPUTTERED SPECIES IN PLASMA SPUTTER-DEPOSITION SYSTEMS

著者名:
掲載資料名:
Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices
シリーズ名:
NATO ASI series. Series E, Applied sciences
シリーズ巻号:
234
発行年:
1993
開始ページ:
115
終了ページ:
120
総ページ数:
6
出版情報:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792322658 [0792322657]
言語:
英語
請求記号:
N11482/234
資料種別:
国際会議録

類似資料:

1 国際会議録 TRANSPORT PHENOMENA IN PLASMA PROCESSING

Gras-Marti A., Valles-Abarca -A. J., Moreno-Marin -C. J.

Kluwer Academic Publishers
7 国際会議録 A Mass Spectrometric System for the Study of Transient Plasma Species in Thin Film Deposition

Johnson+, N. P., Webb++, A. P., Fabian++, D. J.

North-Holland
2 国際会議録 Monte Carlo Simulations of Deposition Processes

Moreno-Marin C. J.

Plenum Press
8 国際会議録 SCANNING TUNNELING MICROSCOPY AND SPECTROSCOPY OF Y-Ba-Cu-O THIN FILMS PRODUCED BY ION BEAM SPUTTER DEPOSITION

Chapman, R.C., Auciello, O., Lichtenwalner, D.J., Adu, R.P., Soble II, C.N., Christensen, K.N., Woolcott, Jr., R.R., …

Materials Research Society
3 国際会議録 THERMALIZATION AND TRANSPORT OF SPUTTERED PARTICLES IN GLOW DISCHARGES

Waldeer T. K., Urbassek M. H., Gras-Marti A., Valles-Abarca A. J.

Plenum Press
9 国際会議録 Z1 and Z2 Oscillations in the Energy Loss of Slow Ions: Inhpmpgeneous Electron Gas Models

Calera-Rubio J., Gra-Marti A., Arista R. N.

Plenum Press
4 国際会議録 COMPUTER SIMULATION OF SCATTERED ION AND SPUTTERED SPECIES EFFECTS IN ION BEAM SPUTTER-DEPOSITION OF HIGH TEMPERATURE SUPERCONDUCTING THIN FILMS

Krauss, Alan R., Auciello, Orlando

Materials Research Society
10 国際会議録 ION-BEAM REACTIVE SPUTTER DEPOSITION OF MgO THIN FILMS ON SILICON AND SAPPHIRE SUBSTRATES

Chow, Alice F., Rou, Shang Hsieh, Lichtenwalner, Daniel J., Auciello, Orlando, Kingon, Angus I.

Materials Research Society
5 国際会議録 Direct and recoil implantation, and collisional ion-beam mixing: recent low-temperature experiments

Gras-Marti A., Littmark U.

Kluwer Academic Publishers
11 国際会議録 Stopping Power og Large Molecular Clusters in Cold and Heated Solids

Arista R. N., Gras-Marti A.

Plenum Press
6 国際会議録 Direct and recoil implantation, and collisional ion-beam mixing: theory (not received in time to be included)

Littmark U., Gras-Marti A.

Kluwer Academic Publishers
12 国際会議録 Reactive Plasma Sputter Deposition of Silicon Oxide

Vossough, K. K., Hunt, C. E.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12