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Convergent-beam parallel detection x-ray diffraction system for characterizing combinatorial epitaxial thin films

著者名:
Omote,K. ( Rigaku Corp. )
Kikuchi,T.
Harada,J.
Kawasaki,M.
Ohtomo,A.
Ohtani,M.
Ohnishi,T.
Komiyama,D.
Koinuma,H.
さらに 4 件
掲載資料名:
Combinatorial and composition spread techniques in materials and device development : 26 January 2000, San Jose, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3941
発行年:
2000
開始ページ:
84
終了ページ:
91
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819435583 [0819435589]
言語:
英語
請求記号:
P63600/3941
資料種別:
国際会議録

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