Surface-micromachined electrostatic diaphragm micropump

Surface-micromachined electrostatic diaphragm micropump

著者名:

Jang,W.I. ( Electronics and Telecommunications Research Institute )
Lee,Y.I.
Choi,C.A.
Jun,C.H.
Kim,Y.T.

掲載資料名:

Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3891

発行年:

1999

開始ページ:

395

終了ページ:

402

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434920 [0819434922]

言語:

英語

請求記号:

P63600/3891

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016695
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Electronics and structures for MEMS
回次:	1999
会議開催地:	Royal Pines Resort, Queensland, Australia
会議開催年:	1999.10.27-1999.10.29

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