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Degradation of PMOS series resistance due to Si implantation for Ti-salicide process

著者名:
Lim,E.H. ( Chartered Semiconductor Manufacturing Ltd. )
Siah,S.-Y.
Lim,C.W.
Lee,Y.M.
Zheng,J.Z.
Sundaresan,R.
Pey,K.L.
さらに 2 件
掲載資料名:
Microelectronic Device Technology III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3881
発行年:
1999
開始ページ:
152
終了ページ:
158
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434784 [0819434787]
言語:
英語
請求記号:
P63600/3881
資料種別:
国際会議録

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