Degradation of PMOS series resistance due to Si implantation for Ti-salicide process
- 著者名:
Lim,E.H. ( Chartered Semiconductor Manufacturing Ltd. ) Siah,S.-Y. Lim,C.W. Lee,Y.M. Zheng,J.Z. Sundaresan,R. Pey,K.L. - 掲載資料名:
- Microelectronic Device Technology III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3881
- 発行年:
- 1999
- 開始ページ:
- 152
- 終了ページ:
- 158
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434784 [0819434787]
- 言語:
- 英語
- 請求記号:
- P63600/3881
- 資料種別:
- 国際会議録
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