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Characterization of nitrided silicon-silicon dioxide interfaces

著者名:
Polignano, M. L.
Alessandri, M.
Brazzelli, D.
Crivelli, B.
Ghidini, G.
Zonca, R.
Caricato, A. P.
Bersani, M.
Sbetti, M.
Vanzetti, L.
Xing, G. C.
Miner, G. E.
Astici, N.
Kuppurao, S.
Lopes, D.
さらに 10 件
掲載資料名:
Nondestructive methods for materials characterization : symposium held November 29-30, 1999, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
591
発行年:
2000
開始ページ:
207
出版情報:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994997 [1558994998]
言語:
英語
請求記号:
M23500/591
資料種別:
国際会議録

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