Silicon-Containing Block Copolymer Resist Materials

Silicon-Containing Block Copolymer Resist Materials

著者名:

掲載資料名:

Microelectronics technology : polymers in advanced imaging and packaging : developed from a symposium sponsored by the ACS Division of Polymeric Materials: Science and Engineering, Inc., and the Polymers for Microelectronics Division of the Society of Polymer Science, Japan, at the 209th National Meeting of the American Chemical Society, Anaheim, California, April 2-6, 1995

シリーズ名:

ACS symposium series

シリーズ巻号:

614

発行年:

1995

開始ページ:

281

出版情報:

Washington, D.C.: American Chemical Society

ISSN:

00976156

ISBN:

9780841233324 [0841233322]

言語:

英語

請求記号:

A05800/614

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016637
シリーズID:	PA00000004
会議名:	National Meeting of the American Chemical Society
回次:	209th
会議開催地:	Anaheim, CA, USA
会議開催年:	1995.04.02-1995.04.06

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