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KINETICS OF EPITAXIAL LAYER GROWTH FROM SILANE ON (100) SILICON

著者名:
Greve, D. W.  
掲載資料名:
Common themes and mechanisms of epitaxial growth : symposium held April 13-15, 1993, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
312
発行年:
1993
開始ページ:
237
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992085 [1558992081]
言語:
英語
請求記号:
M23500/312
資料種別:
国際会議録

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