Real-Time Monitoring by Spectroscopic Ellipsometry and Desorption Mass Spectroscopy During Molecular Beam Epitaxy of AlGaAs/GaAs at High Substrate Temperatures

Real-Time Monitoring by Spectroscopic Ellipsometry and Desorption Mass Spectroscopy During Molecular Beam Epitaxy of AlGaAs/GaAs at High Substrate Temperatures

著者名:

掲載資料名:

In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

569

発行年:

1999

開始ページ:

107

出版情報:

Warrendale, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994768 [1558994769]

言語:

英語

請求記号:

M23500/569

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016595
シリーズID:	PA00000011
会議名:	Symposium on in situ process diagnostics and modelling
回次:	1999
会議開催地:	San Francisco, CA, USA
会議開催年:	1999.04.06-1999.04.07

類似資料:

1 国際会議録 A Kinetic Monte Carlo Model for Ga Desorption From Chemisorbed and Physisorbed States During High-Temperature GaAs MBE Mahalingam, K., Dorsey, D. L., Taferner, W. T., Eyink, K. G. MRS - Materials Research Society	7 国際会議録 Surface Passivation for Low-Temperature UHV Wafer Bonding of GaAs Substrates Hesse, P.J., Haas, T.W., Lampert, W.V., Eyink, K.G., Tomich, D.H., Seaford, M.L. Electrochemical Society
2 国際会議録 INCORPORATION OF EXCESS ARSENIC GaAs AND A1GaAs EPILAYERS GROWNT AT ALOW SUBSTRATE TEMPERATURES BY MOLECULAR BEAM EPITAXY Melloch, M.R., Otsuka, N., Mahalingam, K., Warren, A.C., Woodall, J.M., Kirchner, P.D. Materials Research Society	8 国際会議録 Real-Time Monitoring of Semiconductor Growth by Spectroscopic Ellipsometry Johs, B., Hale, J., Herzinger, C., Doctor, D., Elliott, K., Olson, G., Chow, D., Roth, J., Ferguson, I., Pelczynski, M., … MRS - Materials Research Society
3 国際会議録 Characterization and Modeling of GaAs/AlGaAs P-Type Multi-Quantum Wells for Infared Detection at Normal Incidence Brown, G.J., Taferner, W.T., Hedge, S.M., Eyink, K.G., Szmulowicz, F., Mitchel, W.C., Solomon, J., Walck, S.D. Electrochemical Society	9 国際会議録 Quantitative High-Resolution Transmission Electron Microscopy of III -V Semiconductor Interfaces by Multivariate Statistical Analysis of Exit-Plane Wave … Mahalingam, krishnamurthy, Eyink, Kurt G., Brown, Gail J., Dorsey, Donald L. Materials Research Society
4 国際会議録 In Situ Spectroscopic Ellipsometry for Real-Time Composition Control of Hg1-x CdxTe Grown by Molecular-Beam Epitaxy Dat, R., Aqariden, F., Duncan, W. M., Chandra, D., Shih, H. D. MRS - Materials Research Society	10 国際会議録 A MONTE CARLO MODEL OF GaAs [111]B EPITAXY Dorsey, Donald L., Venkatasubramanian, R., Yen, M. Y., Haas, T. W. MRS - Materials Research Society
5 国際会議録 In Situ Spectroscopic Ellipsometry for Real-Time Composition Control of Hg1-xCdxTe Grown by Molecular-Beam Epitaxy Dat, R., Aqariden, F., Duncan, W. M., Chandra, D., Shih, H. D. MRS - Materials Research Society	11 国際会議録 MOLECULAR BEAM EPITAXY OF LOW TEMPERATURE GROWN GaAs PHOTOCONDUCTORS Dykaar, D.R., Eaglesham, D.J., Keil, U.D., Greene, B.I., Saeta, P.N., Pfeiffer, L.N., Kopf, R.F., Darack, S.B., West, … Materials Research Society
6 国際会議録 In Situ Spectroscopic Ellipsometry for Monitoring and Control of HgCdTe Heterostructures Grown by Molecular Beam Epitaxy Almeida, L. A., Bevan, M. J., Duncan, W. M., Shih, H. D. MRS - Materials Research Society	12 国際会議録 FILMS GROWN ON VICINAL GaAs ( --- ) SUBSTRATES BY MOLECULAR BEAM EPITAXY Yang, K., Schowalter, L. J. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12