In Situ Observation of UV/Ozone Oxidation of Silicon Using Spectroscopic Ellipsometry
- 著者名:
- 掲載資料名:
- In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 569
- 発行年:
- 1999
- 開始ページ:
- 101
- 出版情報:
- Warrendale, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994768 [1558994769]
- 言語:
- 英語
- 請求記号:
- M23500/569
- 資料種別:
- 国際会議録
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