Point and Extended Defect Interactions in Silicon

Point and Extended Defect Interactions in Silicon

著者名:

掲載資料名:

Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

469

発行年:

1997

開始ページ:

379

出版情報:

Pittsburg, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993730 [1558993738]

言語:

英語

請求記号:

M23500/469

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016586
シリーズID:	PA00000011
会議名:	Symposium on defects and diffusion in silicon processing
回次:	1997
会議開催地:	San Francisco, CA, USA
会議開催年:	1997.04.01-1997.04.04

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2 国際会議録 Modeling of Extended Defects in Silicon Law, M. E., Jones, K. S., Earles, S. K., Lilak, A. D., Xu, J-W. MRS - Materials Research Society	8 国際会議録 Effect of Extended Defects on the Enhanced Diffusion of Phosphorus Implanted Silicon Keys, P. H., Li, J. H., Heitman, E., Packan, P. A., Law, M. E., Jones, K. S. MRS - Materials Research Society
3 国際会議録 INTERACTION OF POINT AND EXTENDED DEFECTS IN SILICON: THEIR INFLUENCE ON THE POLYCRYSTALLINE SILICON SUBSTRATE QUALITY FOR HIGH EFFICIENCY SOLAR CELLS Pizzini, S., Acciarri, M., Binetti, S., Acerboni, S., Savigni, C. Electrochemical Society	9 国際会議録 High resolution EELS study of extended defects in silicon Kohno,H., Arai,N., Mabuchi,T., Hirata,M., Takeda,S., Kohyama,M., Terauchi,M., Tanaka,M. Trans Tech Publications
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6 国際会議録 Effect of Arsenic on Extended Defect Evolution in Silicon Brindos, R., Jones, K.S., Law, M.E Materials Research Society	12 国際会議録 POINT DEFECT DETECTOR STUDIES OF OXIDIZED SILICON Meng, H. L., Jones, K. S., Prussin, S. Materials Research Society

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